Strain control of SiGe in submicron region by selective ion implantation

Presentation information

Poster presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB10 (Gymnasium2)

ポスター掲示時間13:30～15:30(PB10会場)

1:30 PM - 3:30 PM

^○Naoki Funabashi¹, Kiyokazu Nakagawa², Kentarou Sawano¹ (Tokyo City Univ¹, Univ.of Yamanashi²)

Keywords:SiGe