The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

[18p-PB10-1~11] 15.5 IV-group crystals and IV-IV-group mixed crystals

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB10 (Gymnasium2)

ポスター掲示時間13:30~15:30(PB10会場)

1:30 PM - 3:30 PM

[18p-PB10-3] Effects of sputtering conditions on formation of Ge layers on Si substrates

Takahiro Tsukamoto1, Nobumitsu Hirose2, Akifumi Kasamatsu2, Takashi Mimura2, Toshiaki Matsui2, Yoshiyuki Suda1 (Tokyo Univ. Agric. Technol.1, NICT2)

Keywords:スパッタエピタキシー,ゲルマニウム