1:30 PM - 3:30 PM
△ [18p-PB4-1] Behavior of metastable excitated Ar atoms in RF magnetron sputtering plasma using carbon target
Keywords:スパッタリング,プラズマ,ダイヤモンドライクカーボン
Presentation information
Poster presentation
08. Plasma Electronics » 8.2 Plasma measurements and diagnostics
[18p-PB4-1~3] 8.2 Plasma measurements and diagnostics
Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB4 (Gymnasium2)
ポスター掲示時間13:30～15:30(PB4会場)