The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB5 (Gymnasium2)

ポスター掲示時間13:30~15:30(PB5会場)

1:30 PM - 3:30 PM

[18p-PB5-3] Formation of DLC films by Facing Targets type HPPS Penning Discharge

Takashi Kimura1, Kingo Azuma2, Setsuo Nakao3 (Nagoya Inst. of Tech.1, Univ. of Hyogo2, AIST-Chubu3)

Keywords:ダイヤモンドライクカ-ボン,ペニング放電,高電力パルス