[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-5] Characterization of Fluorinated Amorphous Carbon Films Fabricated by Plasma Spray on Solid Thin Films Formed from PFC gas Condensed at Cryogenic Temperature

^○Haruka Soga¹, Kota Yamai¹, Kyohei Morikawa¹, Tetuya Sato¹, Kiyokazu Nakagawa¹ (Univ. Yamanashi¹)

Keywords:パーフルオロカーボン