The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

08. Plasma Electronics » 8.4 Plasma etching

[18p-PB6] 8.4 Plasma etching

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB6 (Gymnasium2)

ポスター掲示時間13:30~15:30(PB6会場)

1:30 PM - 3:30 PM

[18p-PB6-1] Damage Characteristics of AlGaN Surface Etched by CF4 and Ar Plasmas

Masahito Niibe1, Retsuo Kawakami2, Yoshitaka Nakano3, Takashi Mukai4, Tatsuo Shirahama2, Shodai Hirai1 (Univ. of Hyogo1, Univ. of Tokushima2, Chubu Univ.3, Nichia Corp.4)

Keywords:エッチングダメージ,AlGaN,CF4