1:30 PM - 3:30 PM
[18p-PB6-1] Damage Characteristics of AlGaN Surface Etched by CF4 and Ar Plasmas
Keywords:エッチングダメージ,AlGaN,CF4
Poster presentation
08. Plasma Electronics » 8.4 Plasma etching
Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB6 (Gymnasium2)
ポスター掲示時間13:30~15:30(PB6会場)
1:30 PM - 3:30 PM
Keywords:エッチングダメージ,AlGaN,CF4