[18p-PB7-1~4] 8.5 Plasma nanotechnology

[18p-PB7-2] Generation of carbon nanotubes by surface-wave microwave plasma-enhanced chemical vapour deposition

^○Mizuki Arai¹, Takashi Ushida¹, Yoshikazu Yoshida¹ (Toyo Univ.¹)

Keywords:carbon nanotube,plasma