[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-3] Analyses of reaction mechanisms in process plasma using computational chemistry

^○Toshio Hayashi¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya University¹)

Keywords:計算化学,分子軌道法,密度汎関数法