The 75th JSAP Autumn Meeting, 2014

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Symposium » Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

[18p-S1-1~9] Computer Simulations for Plasma Processing (state-of-the-art plasma modelling)

Thu. Sep 18, 2014 1:30 PM - 5:30 PM S1 (S1)

3:45 PM - 4:15 PM

[18p-S1-6] Plasma Simulation Using A Commercially Available Solver

○Tatsuru Shirafuji1 (Osaka City Univ.1)

Keywords:プラズマ,シミュレーション,ソルバー