The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.8 Optical measurement technology and devices

[18p-S8-1~13] 3.8 Optical measurement technology and devices

Thu. Sep 18, 2014 1:30 PM - 5:00 PM S8 (S8)

4:00 PM - 4:15 PM

△ [18p-S8-10] Small photonic crystal retarder for high-accuracy point diffraction interferometer

○Ryo Sunayama1, Mitsunori Toyoda1, Yuji Kondo2, Kiyoshi Yamakawa2, Mihiro Yanagihara1 (Tohoku Univ.1, Akita Industrial Technology Center2)

Keywords:EUV,点回折干渉計