The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.8 Optical measurement technology and devices

[18p-S8-1~13] 3.8 Optical measurement technology and devices

Thu. Sep 18, 2014 1:30 PM - 5:00 PM S8 (S8)

4:30 PM - 4:45 PM

[18p-S8-12] Spatial multi-frequency scanning interferometer for 3-D surface measurement

○Ryoko Sato1, Samuel Choi2, Takamasa Suzuki1 (Graduate School of Niigata Univ.1, Niigata Univ.2)

Keywords:干渉計測,表面形状計測