The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.7 Laser processing

[18p-S9-1~14] 3.7 Laser processing

Thu. Sep 18, 2014 1:15 PM - 5:15 PM S9 (S9)

2:30 PM - 2:45 PM

[18p-S9-5] Formation of Conductive Films and Micropatterning by Laser Sintering of Copper Fine Particles

○Akira Watanabe1, Gang Qin1, Tetsu Yonezawa2, Hiroki Tsukamoto2 (IMRAM, Tohoku Univ.1, Faculty of Engineering, Hokkaido Univ.2)

Keywords:銅微粒子,レーザーシンタリング,銅微細配線