Relationship between the absorption and electrical and crystallographical properties in transparent conducting Al-doped ZnO films with textured surface

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Fri. Sep 19, 2014 9:00 AM - 11:45 AM A12 (E301)

9:45 AM - 10:00 AM

^○Toshihiro Miyata¹, Toshinori Yamanaka¹, Ryousuke Uozaki¹, Tadatsugu Minami¹ (OEDS R&D Center, K. I. T.¹)

Keywords:透明導電膜,ZnO,スパッタリング