The 75th JSAP Autumn Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[19a-A12-1~10] Nanocarbon Technology

Fri. Sep 19, 2014 9:00 AM - 11:45 AM A12 (E301)

11:00 AM - 11:15 AM

△ [19a-A12-8] Fabrication of SnO thin films under the atmosphere and evaluations of physical properties of the thin films

○Takayuki Uchida1, Toshiyuki Kawaharamura2, Shizuo Fujita1 (Dept. Electron. Sci. and Eng., Kyoto Univ.1, Sys. Eng., Kochi Univ. of Tech.2)

Keywords:酸化スズ,ミストCVD,酸化物半導体