The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[19a-A14-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Fri. Sep 19, 2014 9:00 AM - 11:45 AM A14 (E305)

9:15 AM - 9:30 AM

[19a-A14-2] Experiments on Focal Depth Expansion of Scanning Transmission Electron Microscope using Annular Apertures

Tadahiro Kawasaki1,2,3, Takafumi Ishida3, Takaomi Matsutani4, Tetsuji Kodama5, Takashi Ikuta6, Takayoshi Tanji1 (Ecotopia, Nagoya Univ.1, JFCC2, Eng., Nagoya Univ.3, Kinki Univ.4, Meijo Univ.5, Osaka Elect. Comm. Univ.6)

Keywords:円環絞り,STEM,焦点深度