[19a-A14-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

[19a-A14-2] Experiments on Focal Depth Expansion of Scanning Transmission Electron Microscope using Annular Apertures

^○Tadahiro Kawasaki^1,2,3, Takafumi Ishida³, Takaomi Matsutani⁴, Tetsuji Kodama⁵, Takashi Ikuta⁶, Takayoshi Tanji¹ (Ecotopia, Nagoya Univ.¹, JFCC², Eng., Nagoya Univ.³, Kinki Univ.⁴, Meijo Univ.⁵, Osaka Elect. Comm. Univ.⁶)

Keywords:円環絞り,STEM,焦点深度