The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[19a-A14-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Fri. Sep 19, 2014 9:00 AM - 11:45 AM A14 (E305)

9:45 AM - 10:00 AM

[19a-A14-4] Electron beam irradiation time dependence on a surface potential distribution at a resist film on a conductive substrate

○(M2)Kentaro Kumagai1, Sosuke Hosoi1, Yuki Handa1, Masatoshi Kotera1 (Osaka Institute of Technology1)

Keywords:電子ビーム