The 75th JSAP Autumn Meeting, 2014

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13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19a-A15-1~9] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Fri. Sep 19, 2014 9:30 AM - 12:00 PM A15 (E306)

9:30 AM - 9:45 AM

[19a-A15-1] Water nozzle design for batch-type silicon wafer wet cleaner

○Nobutaka Ono1, hitoshi Habuka1, Akihiro Goto2 (Yokohama National Univ.1, Pre-tech.2)

Keywords:洗浄