The 75th JSAP Autumn Meeting, 2014

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13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19a-A15-1~9] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Fri. Sep 19, 2014 9:30 AM - 12:00 PM A15 (E306)

11:30 AM - 11:45 AM

[19a-A15-8] Electrical Characteristics and Microstructural Analysis of ZrN and HfN/Ge Contacts

○Ryutaro Noguchi1, Masatoshi Mitsuhara2, Keisuke Yamamoto3, Minoru Nishida2, Hiroshi Nakashima3, Toru Hara4 (I-Eggs, Kyushu Univ.1, Dept. of Electrical and Materials Science, Kyushu Univ.2, KASTEC, Kyushu Univ.3, NIMS4)

Keywords:Germanium,STEM