[19a-A18-1~9] 3.15 Silicon photonics

[19a-A18-7] Loss Improvement of Vertically-Curved Silicon Waveguide by Annealing

^○(M2)Syougo Tajima^1,2, Tomoya Yoshida², Takashi Nishi², Ryohei Takei², Emiko Omoda², Masayoshi Nagao², Noboru Miura¹, Masahiko Mori², Youichi Sakakibara² (Meiji Univ.¹, AIST²)

Keywords:シリコンフォトニクス,光インターコネクション,イオン注入