[19a-A19-1~13] 13.3 Si Process・Interconnect・MEMS・Integration

[19a-A19-13] Silicidation-induced Rupturing of Si Nanowire with Oxide Shell

^○Kohei Takei¹, Hiroki Kosugiyama¹, Shuichiro Hashimoto¹, Jing Sun¹, Shuhei Asada¹, Taiyu Xu¹, Takashi Wakamizu¹, Takashi Matsukawa², Meishoku Masahara², Takanobu Watanabe¹ (Waseda Univ.¹, AIST²)

Keywords:Si,silicide,nanowire