12:15 PM - 12:30 PM
[19a-A19-13] Silicidation-induced Rupturing of Si Nanowire with Oxide Shell
Keywords:Si,silicide,nanowire
Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
Fri. Sep 19, 2014 9:00 AM - 12:30 PM A19 (E311)
12:15 PM - 12:30 PM
Keywords:Si,silicide,nanowire