Presentation information

Tweet

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19a-A19-1~13] 13.3 Si Process・Interconnect・MEMS・Integration

Fri. Sep 19, 2014 9:00 AM - 12:30 PM A19 (E311)

9:15 AM - 9:30 AM

[19a-A19-2] Vapor phase and surface reaction in SiHCl₃-SiH_x system

^○Ayumi Saito¹, Ayumi Sakurai¹, Hitoshi Habuka¹ (Yokohama National Univ.¹)

Keywords:化学気相堆積法