The 75th JSAP Autumn Meeting, 2014

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Oral presentation

12. Organic Molecules and Bioelectronics » 12.7 Medical engineering and biochips

[19a-A2-1~10] 12.7 Medical engineering and biochips

Fri. Sep 19, 2014 9:00 AM - 11:45 AM A2 (N1)

11:30 AM - 11:45 AM

▼ [19a-A2-10] DLC Film Deposited on Micro-Electrode with NBECVD for Bio-LSIs

○(P)Xijiang Chang1, Yoshiyuki Kikuchi1,2, Tomohiro Kubota1, Kumi Inoue3,4, Tomokazu Matsue3,4,5, Toshihisa Nozawa2, Seiji Samukawa1,5 (Institute of Fluid Science, Tohoku Univ.1, Tokyo Electron Limited2, Graduate School of Environmental Studies, Tohoku Univ.3, Micro-SIC, Tohoku Univ.4, WPI-AIMR, Tohoku Univ.5)

Keywords:DLC,NBECVD,Bio-LSI