The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

11. Superconductivity » 11.2 Thin films, thick films, coated conductors and thin film crystal growth

[19a-A20-1~12] 11.2 Thin films, thick films, coated conductors and thin film crystal growth

Fri. Sep 19, 2014 9:00 AM - 12:15 PM A20 (E312)

9:00 AM - 9:15 AM

[19a-A20-1] Fabrication of TnN Thin Films for Microwave Kinetic Inductance Detectors

○Hironobu Yamada1, Tsubasa Abe1, Atsushi Saito1, Shigetoshi Ohshima1, Seiichiro Ariyoshi2, Jongsuck Bae2, Kensuke Nakajima1 (Yamagata Univ.1, Nagoya Inst. Tech.2)

Keywords:TaN,マイクロ波力学インダクタンス検出器