[19a-A25-1~13] 16.3 Bulk, thin-film and other silicon-based solar cells

[19a-A25-1] Development of selective B2H6 elimination method and its performance evaluation toward purification of low-purity Si material

^○Hiromasa Ohmi¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹ (Osaka Univ.¹)

Keywords:プラズマ,精製,シリコン