Thinning of Silicon-Wire Prepared by Anodization

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.2 Ultrathin films and quantum nanostructures

Fri. Sep 19, 2014 9:00 AM - 12:30 PM A27 (N302)

12:00 PM - 12:15 PM

^○Takuya Imaizumi¹, Tomoki Shimizu¹, Toshiaki Suzuki², Masaaki Niwa¹, Mitsuya Motohashi¹ (Tokyo Denki Univ.¹, JEOL²)

Keywords:シリコンワイヤー,陽極酸化