[19a-B1-1~9] 17.4 Device application

△ [19a-B1-7] In-plane Conduction Evaluation of Dense Carbon Nanotube Forest Formed on Silicon Carbide

^○Masafumi Inaba¹, Chih-Yu Lee¹, Kazuma Suzuki¹, Megumi Shibuya¹, Miho Myodo¹, Yu Hirano¹, Atsushi Hiraiwa¹, Wataru Norimatsu², Michiko Kusunoki², Hiroshi Kawarada¹ (Waseda Univ.¹, Nagoya Univ.²)

Keywords:カーボンナノチューブ,シリコンカーバイド