[19a-C5-1~10] Materials Science of Singularity in Nitride semiconductors～Characterization and Crystallography～

[19a-C5-6] A femtosecond pulsed electron beam for characterizing wide bandgap semiconductors

^○Shigefusa Chichibu¹, Youichi Ishikawa¹, Yoshiki Yamazaki¹, Kazunobu Kojima¹ (Tohoku Univ.¹)

Keywords:集束パルス電子線