[19a-C8-1~11] 3.5/3.14 Code-sharing session

[19a-C8-9] Development of 193-nm narrow-linewidth solid state laser system using CLBO crystal for ArF excimer laser seeding.

^○Hironori Igarashi¹, Hongwen Xuan², Zhigang Zhao², Shinji Ito¹, Kouji Kakizaki¹, Yohei Kobayashi² (Gigaphoton Inc.¹, ISSP, Univ. of Tokyo²)

Keywords:Frequency conversion,CLBO,ArF eximer laser