The 75th JSAP Autumn Meeting, 2014

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Poster presentation

03. Optics and Photonics » 3.8 Optical measurement technology and devices

[19a-PA6-1~10] 3.8 Optical measurement technology and devices

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PA6 (Gymnasium1)

ポスター掲示時間9:30～11:30(PA6会場)

9:30 AM - 11:30 AM

[19a-PA6-8] High-lateral-resolution absolute surface profiler using local angle measurement

○Youichi Bitou1, Yohan Kondo1 (AIST1)

Keywords:形状測定