[19a-PB1-1~23] 6.2 Carbon-based thin films

[19a-PB1-19] Fabrication of diamond MESFET by post wet anneal treatment

^○Kazuhiro Nakanishi¹, Takuma Minamiyama¹, Daisuke Miyata¹, Yushi Tsuji², Norio Tokuda^1,3,4, Masahiko Ogura^3,4, Satoshi Yamasaki^3,4, Akiharu Morimoto¹, Takashi Kawae¹, Takao Inokuma¹ (Grad. School of Natural Sci. & Tech. Kanazawa Univ.¹, College of Sci. & Eng. Kanazawa Univ.², AIST³, JST, CREST⁴)

Keywords:ダイヤモンド,FET,OH終端