The 75th JSAP Autumn Meeting, 2014

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Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[19a-PB1-1~23] 6.2 Carbon-based thin films

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB1 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB1会場)

9:30 AM - 11:30 AM

[19a-PB1-5] Fabrication of a-CNx:H film by microwave discharge flow of C6H14/N2 gas mixture

○Kenya Hiramatsu1, Haruhiko Ito1, Hidetoshi Saitoh1 (Nagaoka Univ. of Tech1)

Keywords:マイクロ波プラズマCVD