The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[19a-PB1-1~23] 6.2 Carbon-based thin films

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB1 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB1会場)

9:30 AM - 11:30 AM

[19a-PB1-7] Fabrication of a-CNx:H films with high nitrogen content by RF plasma CVD

○Kazuki Sakurai1, Teppei Tsuda1, Hidetoshi Saitoh1, Haruhiko Ito1 (Nagaoka Univ.of Tech1)

Keywords:高周波プラズマCVD