9:30 AM - 11:30 AM
[19a-PB2-5] Chemical deposition of zirconium oxide films by using supercritical carbon dioxide fluid
Keywords:薄膜,超臨界流体,酸化ジルコニウム
Poster presentation
06. Thin Films and Surfaces » 6.4 New thin-film materials
Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB2 (Gymnasium2)
ポスター掲示時間9:30~11:30(PB2会場)
9:30 AM - 11:30 AM
Keywords:薄膜,超臨界流体,酸化ジルコニウム