The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19a-PB2-1~11] 6.4 New thin-film materials

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB2 (Gymnasium2)

ポスター掲示時間9:30~11:30(PB2会場)

9:30 AM - 11:30 AM

[19a-PB2-5] Chemical deposition of zirconium oxide films by using supercritical carbon dioxide fluid

Marina Shiokawa1, Katsushi Izaki1, Hiroshi Uchida1 (Sophia Univ.1)

Keywords:薄膜,超臨界流体,酸化ジルコニウム