Effects of source materials on fabrication of β-FeSi<sub>2</sub> thin films by vacuum deposition

Presentation information

Poster presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB4会場)

9:30 AM - 11:30 AM

^○Haruya Kobayashi¹, Yuiko Watahiki¹, Keisuke Sato¹, Kanichiro Nakaoka¹, Yoshiaki Hara¹ (Ibaraki NCT¹)

Keywords:半導体,シリサイド,FeSi2