9:30 AM - 11:30 AM
[19a-PB4-4] Effects of source materials on fabrication of β-FeSi2 thin films by vacuum deposition
Keywords:半導体,シリサイド,FeSi2
Poster presentation
14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials
Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)
ポスター掲示時間9:30~11:30(PB4会場)
9:30 AM - 11:30 AM
Keywords:半導体,シリサイド,FeSi2