The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

[19a-PB4-1~9] 14.1 Physical properties of exploratory materials

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)

ポスター掲示時間9:30~11:30(PB4会場)

9:30 AM - 11:30 AM

[19a-PB4-4] Effects of source materials on fabrication of β-FeSi2 thin films by vacuum deposition

Haruya Kobayashi1, Yuiko Watahiki1, Keisuke Sato1, Kanichiro Nakaoka1, Yoshiaki Hara1 (Ibaraki NCT1)

Keywords:半導体,シリサイド,FeSi2