Elucidation of the initial oxidation process of 4H-SiC by AR-XPS study (Ⅱ)

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB5 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB5会場)

9:30 AM - 11:30 AM

^○Tomoya Sasago¹, Jin Arai¹, Hiroshi Nohira¹ (TCU¹)

Keywords:シリコンカーバイド,初期酸化,X線光電子分光法