The 75th JSAP Autumn Meeting, 2014

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Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[19a-PB5-1~17] 15.6 IV-group-based compounds

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB5 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB5会場)

9:30 AM - 11:30 AM

[19a-PB5-2] Analysis of Dislocations in SiC Using Multi Directional STEM Method

○Takahiro Sato1, Yoshihiro Ohtsu2, Yoshihisa Ohrai1, Toshiyuki Isshiki3, Munetoshi Fukui1 (Hitachi High-Technologies corporation1, Hitachi High-Tech Manufacturing & Service corporation2, Kyoto Institute of Technology3)

Keywords:4H-SiC,走査透過電子顕微鏡,基底面転位