9:30 AM - 11:30 AM
[19a-PB5-4] Dicing of SiC wafer by PCVM with a shadow mask
Keywords:SiC,プラズマ
Presentation information
Poster presentation
15. Crystal Engineering » 15.6 IV-group-based compounds
[19a-PB5-1~17] 15.6 IV-group-based compounds
Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB5 (Gymnasium2)
ポスター掲示時間9:30～11:30(PB5会場)