Carbon Desorption in SiC Thermal Oxide film by NF<sub>3</sub> added Oxidation

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB5 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB5会場)

9:30 AM - 11:30 AM

^○(M2)Masahito Nagoshi¹, Ryu hasunuma¹, Kikuo Yamabe¹ (University of Tsukuba¹)

Keywords:SiC,パワーデバイス,SiO2