The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

08. Plasma Electronics » 8.1 Plasma production and control

[19a-S8-1~11] 8.1 Plasma production and control

Fri. Sep 19, 2014 9:00 AM - 12:00 PM S8 (S8)

11:45 AM - 12:00 PM

[19a-S8-11] Development of Numerically Controlled Sacrificial Oxidation with Atmospheric Pressure Plasma Generator Using Array-Type Electrode

Hiroyasu Takei1, Satoshi Kurio1, Satoshi Matsuyama1, Kazuto Yamauchi1, Yasuhisa Sano1 (Osaka Univ.1)

Keywords:大気圧プラズマ,プラズマ酸化,NC加工