9:45 AM - 10:00 AM
[19a-S8-4] Plasma Potential Measurement on ECRIS by Using Extracted Ion Beam
Keywords:ECR plasma,shallow junction
Oral presentation
08. Plasma Electronics » 8.1 Plasma production and control
Fri. Sep 19, 2014 9:00 AM - 12:00 PM S8 (S8)
9:45 AM - 10:00 AM
Keywords:ECR plasma,shallow junction