[19a-S8-1~11] 8.1 Plasma production and control

[19a-S8-7] The modeling of neutral beam acceleration mechanism and calculation of waveform of RF applied voltage

^○Yasuaki Sakakibara¹, Akiyoshi Mitsumori¹, Yoshiyuki Kikuchi^1,2, Seiji Samukawa² (Tokyo Electron¹, Tohoku Univ.²)

Keywords:マイクロ波プラズマ,中性粒子ビーム,モデリング