[19a-S8-1~11] 8.1 Plasma production and control

[19a-S8-9] Actinometric Investigation on Relative Change of Atomic Hydrogen Density in High-Pressure Microwave Hydrogen Plasma

^○Takahiro Yamada^1,2, Tatsuya Hirano¹, Kosuke Yamada¹, Hiromasa Ohmi^1,2, Hiroaki Kakiuchi^1,2, Kiyoshi Yasutake^1,2 (Osaka Univ.¹, JST CREST²)

Keywords:原子状水素密度,アクチノメトリ,マイクロ波