[19a-S9-1~11] 8.3 Plasma deposition of thin film and surface treatment

[19a-S9-5] Simulation of Capacitively-coupled RF Plasmas in Tetrametylsilane for Diamond-Like Carbon Coating

^○Akinori Oda¹, Satoru Kawaguchi², Kohki Satoh², Hiroyuki Kousaka³, Takayuki Ohta⁴ (Chiba Inst. Technol.¹, Muroran Inst. Technol.², Nagoya Univ.³, Meijo Univ.⁴)

Keywords:ダイヤモンドライクカーボン,テトラメチルシラン,プラズマシミュレーション