[19a-S9-1~11] 8.3 Plasma deposition of thin film and surface treatment

△ [19a-S9-8] Surface Chemistry and doping efficiency of silicon nanocrystals

^○Michihiro Sugaya¹, Ding Yi¹, Zhou Shu¹, Tomohiro Nozaki¹ (Titech¹)

Keywords:シリコンナノ粒子