The 75th JSAP Autumn Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[19p-A12-1~16] Nanocarbon Technology

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A12 (E301)

4:30 PM - 4:45 PM

[19p-A12-12] Crystal structures of Ga2O3 dependent on substrates and gases during sputtering

○Housei Akazawa1 (NTT MI Labs.1)

Keywords:Ga2O3,結晶相,epitaxy