The 75th JSAP Autumn Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[19p-A12-1~16] Nanocarbon Technology

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A12 (E301)

2:30 PM - 2:45 PM

[19p-A12-5] Growth of corundum-type In2O3 thin films with Ga2O3 buffer layers by mist CVD method

○(B)Yuta Suwa1, Toshiyuki Kawaharamura1 (System Engineering, Kochi Univ. of Tech1)

Keywords:ミスト化学気相成長法,酸化インジウム,コランダム構造